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July 2005 Semiconductor Safety Update

'Conforms to the Intent' – The line item ballot to SEMI S2 to clarify “Conforms to the Intent” failed during the summer standards meetings. This was largely because of concern about the nebulous nature of how this would impact the interpretation of the specific requirements of the SEMI S2 Guideline. The task force took this document back to rework and to return to ballot at a later date.

MESSC Subcommittee – This subcommittee considered a number of significant issues.

• A working group was formed to modify SEMI S2’s requirements for the electrical AIC ratings of the equipment, to bring these into line with the America National Electric Code (NEC). This activity was just started in July.
• A working group was formed to propose changes to SEMI S2 to replace the electrical requirements with those of SEMI S22. This activity was also just started during the July meetings.
• Discussions also took place on the future course of SEMI S2 development. A vote was taken during the meeting to determine which direction the subcommittee favored. The greatest support was to revise S2 in sections. This would entail putting major portions of S2 up for ballot at a time, instead of taking the whole document to ballot, as was done in 2000. This vote however, is not binding, and the conclusion of this discussion was to ask the other regions what their opinion was on this issue.

SEMI S6 Ventilation - The new ventilation standard for SEMI S6 was returned to ballot. Although this document is being mature and can reasonably expect to pass in the coming year.

SEMI S3 Heated Chemcal Bath –The first major revision to the heated chemical bath standard SEMI S3 is also maturing. This document was returned to ballot.

SEMI S22 Electrical – Two minor line items to SEMI S22 passed, with the delayed implementation date of July 2005. The major line item to align the document with section 11, 12, and 13 of SEMI S2 was returned to ballot.