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March 2005 Semiconductor Safety Update

 

Report From the Austin, TX SEMI Standards Meeting March 2005

Robots and Automation Update (click here)

Robotics and Automation As previously posted, SEMI is developing a new safety guideline for Robotics and Automation. Editorial changes had been made between the Fall Standards Meetings (Portland) and the Spring Standards Meetings (Austin). The Austin Meeting focused on three technical topics contained in the draft document. All three addressed engineering protections. (read more...)

SEMI S3 - Heated Chemical Baths (click here)

The detail of the existing SEMI S3-91 is primarily focused on electric shock and fire. The proposed revisions to SEMI-S3 include clarification of the hazards associated with chemical characteristics. The proposed SEMI S3 revision draft document was out for ballot, so the focus of the discussion in Austin was the negative comments received on that ballot. Further discussion of open issues continues during weekly teleconferences scheduled for Wednesdays from 8:00 to 10:00 AM Pacific time. The technical topics of discussion at the Spring Meeting were limited to three primary issues. (read more...)

SEMI S14 Revision - Fire Risk Analysis (click here)

At the Spring Meeting in Austin representatives from SEMI Japan presented their findings that Section 14 of SEMI S2 and SEMI S14 are incorrect or incomplete. These topics dominated the technical discussion. (read more...)

SEMI S8 Revision - Ergonomics (click here)

The first part of the Spring Meeting was primarily focused on comments received from the last SEMI S8 ballot cycle. Three line item changes to SEMI S8-1103 had been proposed and the negative issues were discussed at the meeting. General issues were debated in the latter part of the meeting. (read more...)

Lifting Equipment Update

The Lifting Equipment Task Force continued to clarify an effective scope and approach for this new guideline. Following the “kick off” meeting at Fall Standards Meeting in Portland, the Task Force has met by teleconference to develop a stand-alone SEMI document addressing lifting systems. However, several end-users have identified a desire to drive basic lift system design/test criteria into Section 18.5 of SEMI S2 immediately. Detailed design guidelines would follow as a Related Information, or some other “non-binding” form. The basic lift system criteria selected for the main body of SEMI S2 includes criteria for factor of safety, static testing, dynamic testing, stability, overload, seismic, etc. Weekly teleconferences have been scheduled for Mondays from 9:00 to 10:30 am Pacific time.

SEMI S10 Revision - Risk Ranking

The concern with SEMI S10 primarily has to do with the determination of likelihood. There is a question about the validity of using a statistical analysis to determine the likelihood of an incident. The issue for a new piece of equipment is that there is no available assembled and functional system specific data. For existing and installed systems there is not generally sufficient numbers or years of use to support conclusions for likelihood ratings. To that end, there has been a proposal to eliminate the numbers from the likelihood determination all together. No proposal for an alternate methodology was provided. In an effort to educate all parties, a risk ranking working session was proposed for SEMICON West, although this has not been formally accepted.

EHS for e-Diagnostics

The subject of e-Diagnostics is a major challenge for the industry to deal with as there is no existing guideline for a concept that is already being implemented. E-Diagnostics is essentially “remote control” of Semiconductor Manufacturing Equipment, which allows multiple users to access the system control and execute commands. The concern is remote users issuing commands that may injure personnel who are physically at the equipment. This SEMI Task Force is addressing the major challenge of creating an EHS document that controls the hazards associated with remote control of systems. The need for this document is immediate because “remote control” is already being implemented within the industry. The task is complicated by the complexity of the problems as there are many hazards and combinations of events and hazards that may give rise to injury. The Task Force has scheduled weekly teleconferences on Tuesdays from 11:00 AM to 1:00 PM Pacific time to continue the discussion prior the next meeting at SEMICON West.