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Environmental Considerations

SEMI S2 requires the supplier to evaluate the environmental impacts of the tool throughout its life cycle. Life cycle stages include ‚ concept, design, manufacture, packaging, install, production, decontamination and decommissioning. . It is becoming increasingly important that design processes positively affect the environment and improvements are made over time. S2 provides design guidelines that apply to all phases of the equipment life.

Resource Conservation

Resource conservation involves the reduction of input materials to the tool through source reduction, reuse mechanisms, or recycling. Effective resource conservation can have a positive effect on the tool cost-of ownership.
Resources to conserve include chemicals, energy, water, packaging materials, and materials of construction. Improvements can be made through a variety of methods, for example:

process optimization that reduces chemical consumption;

design changes that reduce water, chemical, or energy use;

green design initiatives;

chemical substitution for less hazardous materials;

packaging reduction;

Chemical Selection Processes

Chemicals used in process and maintenance should be chosen carefully to provide maximum yield and process quality while reducing EHS impacts. The toxicity, by-product generation, and environmental impact of chemicals are important. Wherever possible, the chemical with the lowest toxicity and least impact to the environment should be chosen.

Chemicals of concern include:

Ethylene based glycol ethers

Class I and Class II Ozone Depleting Substances (ODS¼s)

For a full list of these substances and further information go to: http://www.epa.gov/ozone/ods.html

Perfluorocompounds (PFC’s

Volatile Organic Compounds (VOC¼s) and Hazardous Air Pollutants (HAP¼s)

Carcinogens

Reproductive toxins

Imported chemicals not listed on TSCA inventory

Component parts constructed of:

Mercury

Lead

Cadmium

Chromium

Beryllium

Arsenic

Release of chemicals

The release of chemicals needs to be managed through good design of secondary containment, leak sensors, and shutdown mechanisms. Also its important to ensure that the secondary containment is compatible with the chemistries it will contain and that mixing of chemistries does not cause an increased hazard. The control of intended releases means the method designed in to the equipment to handle hazardous materials during regular process. Equipment that regularly handles hazardous materials will have control measures to eliminate or reduce exposure to personnel and the environment. This includes design features such as exhaust and ducting for gases, waste drains for liquids, and interlock systems. These methods of controlling hazardous materials should be described. This allows the employee to understand the control mechanisms in place to safely use the equipment. Defeat of these systems could cause unintended exposure to personnel and the environment. Control of unintended releases includes features designed in to the equipment to handle leaks, spills or other releases. These features include secondary containment, leak sensors, exhaust, interlock systems and shutdown systems and alarms. The location and function of secondary containment, leak sensors and shutdown mechanisms should be described. If exhaust is designed to maintain safe conditions during a leak or spill, then the proper function and specifications for the exhaust should be described. Finally, interlock and automatic shutdown systems designed to bring the equipment to a safe state in the event of a spill, leak, or rupture should be fully described.

Effluents, Wastes and Emissions

Waste may be generated during process and maintenance operations. Generally, if hazardous materials are used during process or maintenance and there are by-products or excess materials left over, then these materials will be regulated as hazardous waste. This waste needs to be identified in the manual and instructions regarding the proper identification, storage and handling of this waste should be included.
List all materials that may become hazardous waste during process, maintenance, and cleaning operations. Hazardous waste may include liquids, process gases, and contaminated parts and PPE. Include items such as batteries, old printed circuit boards with lead solder, mercury switches, tapes and components made of metals such as copper, lead, mercury, beryllium.
Identify the characteristics of all waste and any known special handling and storage requirements. Identify if there are incompatible waste streams and decide what to do with them.
The quantity of waste generated should be identified during design. This list should include all hazardous wastes including by-products generated, such as contaminated wipes and parts.
In addition to hazardous waste, solid waste may be generated. Solid waste is all other waste that is not regulated as hazardous waste (such as metal components, packaging, and plastics). In certain locations, this solid waste may be regulated just as heavily as hazardous waste. There may be restrictions on what can be disposed of in the landfill.

If packaging is reusable or returnable, include return and reuse information, including contact information.

Equipment Decontamination and Decommissioning

At the end of life, equipment may be contaminated with hazardous materials and/ or by-products. Procedures to clean and prepare the equipment for disposal or decommissioning should be prepared. Specific components and parts that may be contaminated with residual materials should be identified and instructions to handle them should be provided. SEMI S12 is the standard used to determine compliance to equipment decontamination requirements.