SEMI S2 Basics
Earth Tech’s team of highly experienced experts is at the heart of our approach to SEMI S2 reviews. The complex nature of semiconductor fabrication tools requires that an integrated team conducts equipment safety reviewsby bringing together diverse expertise into this unified effort. The Earth Tech team includes highly experienced electrical engineers, industrial hygienists, chemical engineers, ergonomists, safety engineers, mechanical engineers, and environmental engineers. Not only are these diverse experts vital to a thorough SEMI S2 review, but strong coordination between their individual efforts is also essential. The Earth Tech team approach ensures close coordination of diverse disciplines is met.
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Click each subject for a brief description of our various areas of expertise.
Earth Tech's professionally registered electrical engineers evaluate the electrical system design and construction to applicable national, international, and industry electrical standards. We review both the design drawings and the physical tool construction to evaluate compliance to the construction standards requirements. Earth Tech's electrical engineering expertise combines extensive experience in the evaluation of large semiconductor fabrication equipment with an in-depth knowledge of the applicable electrical safety standards. This is vital for the efficient and thorough review of the types of highly complex electrical systems employed in these tools. Key concerns are identifying any potential fire hazards or electric shock issues. Testing is also done to establish compliance to the test requirements of the relevant electrical safety standards.
While an electrical engineering examination of interlock circuit design and construction is a necessary component of any interlock evaluation, it is not sufficient. Vital to any comprehensive interlock evaluation is input from all the diverse experts who make up an evaluation. Earth Tech's integrated team approach is central to a sound safety evaluation — only after all team members define the vital safety systems that are essential for their respective realms of expertise can a comprehensive review of the interlocking system be conducted.
Because of the innovative cutting edge technology used in the manufacture of semiconductor devices, a comprehensive fault analysis is vital to ensuring safe tool design. The Earth Tech approach to fault analysis focuses on the two key sources of human injury: system damage and adverse environmental impact. First, the flow of energy and substances through the system is examined in detail. Emphasis is given to how energy is introduced into the tool, controlled, transformed, transferred, utilized, and removed from the tool. Included in this review are the electrical, chemical, radiation, mechanical, pneumatic, ventilation, and thermal systems. Second, all foreseeable human interaction with the system is reviewed. When examining the system of energy distribution and methods of human interface, both normal operation and potential fault modes are considered. Where hazards are found to exist, a risk assessment in accordance with SEMI SI0 is done. Both the probability of an event and the severity of the associated risk are weighed in this approach.
Sources of ignition as well as the use of flammable materials in the construction of equipment are a major focus of an Earth Tech equipment review. Construction evaluation and testing of both fire detection and suppression systems are a vital part of the process. Classified locations under the National Electric Code constitute a vital area for the electrical engineering experience that Earth Tech provides. Because of the nature of their design and their history in the industry, heated chemical baths are a major concern. Earth Tech's engineers have experience with the design and testing of these systems to ensure a thorough review of their potential hazards.
Robotics and Automation
Robotic systems and automated moving parts are a major hazard in semiconductor manufacturing tools. Our staff has extensive experience with complex robotic systems, including full robotic safety reviews. We do not overlook the hazards associated with less sophisticated forms of automation. Pneumatic logic and fault modes associated with any pneumatic system are critical to a comprehensive safety review.
Design review and testing of the chemical distribution and ventilation systems to industry standards are basic to the evaluation process. Fault conditions that may give rise to safety hazards are a key focus of this review. Earth Tech's staff of certified industrial hygienists conduct industrial hygiene monitoring for normal operating conditions, as well as for fault conditions. In addition, Earth Tech also has staff toxicologists to evaluate systems with innovative chemistries. Earth Tech's professionally registered chemical engineers review complex chemistry delivery systems. Earth Tech's ventilation experts review and test exhaust and ventilation systems. Experience with tracer gas testing to SEMI F15 is also a vital element of our team. This test methodology is an integral part of Earth Tech's evaluation of secondary containment of hazardous chemistries.
Central to an equipment review of a semiconductor fabrication tool is a mass balance study. Earth Tech's professionally certified chemical engineers have the experience to perform these studies on even the most complex of equipment. Experience with quadruple mass spectrometer technology and real-time sampling of exhaust effluent lines are major strengths that Earth Tech brings to this portion of an SEMI S2 evaluation.
Our strong worldwide presence and sound understanding of the environmental requirements of local jurisdictions help equipment manufacturers effectively deal with environmental challenges in the global marketplace.
Central to any ergonomics review is SEMI S8 and the supporting checklist. Earth Tech's ergonomic evaluations focus on comprehensive data collection and sound ergonomic data evaluation. We provide detailed task operator interface analyses, preventative maintenance and troubleshooting to ensure a comprehensive review of all foreseeable human interaction with the system. We explore sources of ergonomic injury from heavy lifts to cumulative trauma disorders in detail. Earth Tech's ergonomic experts analyze the ergonomic data collected to ensure good human factors design. The Supplier Ergonomics Success Criteria (SESC) checklist serves as an important aid to Earth Tech reviews.
Reports and Documentation
Detailed reports are an integral part of the Earth Tech process. We fully explain evaluation methods as well as test methodology and cocument the findings and hard data supporting those conclusions. Earth Tech's thorough reports permit the reader to "look over the shoulder of the evaluator". The data collection process, hard data records, engineering reasoning, and conclusions are all provided in detail on all important issues. This includes a fully completed SESC checklist and test data sheets. A system description at the front of the report focuses on design aspects of potential safety concerns, and permits the reader to put all this information into perspective.
ETMS2.com
