Semiconductor Equipment Safety Training Programmes
Earth Tech Microelectronics group provides a full range of design for safety compliance. Our courses have been successfully taught throughout the world. A central element of the strength of these courses is the experience of the instructors. Earth Tech Microelectronics group only uses engineering safety professionals who have years of hands-on experience to conduct training. This greatly enhances the interactive portion of the training course that is essential to its success. While the Earth Tech Microelectronics group has a standard suite of courses, any of these courses can be customized to delete materials that may not be useful to a given equipment manufacturer, or to add materials that may be of especial use. Earth Tech Microelectronics group’s standard package of training includes the following courses.
Design for SEMI S2 Compliance (1-Day Course)
This course provides a comprehensive overview of the requirements of SEMI S2 the “Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment” and its essential supporting standards. Its focus is in two essential areas; 1) developing a basic understanding of the requirement of SEMI S2, and 2) helping to identify the most common SEMI S2 non-compliances and how to avoid them. This is a good overview course for companies that are new to the S2 process.
Design for SEMI S2 Compliance (3-Day Course)
This is an in-depth course intended for design engineers on the requirements of SEMI S2 “Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment”. Instruction is focused on both understanding requirements and applying them to engineering design. Training is supported by the Earth Tech’s virtual equipment, which is used to illustrate engineering examples. Discussions as well as examples cover the full range of SEMI S2 topics including electrical, mechanical, chemical, ventilation, industrial hygiene, seismic, documentation, interlocks, and EMO. The following circuit supporting standards are integrated into this course.
- SEMI S8 - Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing
- F15 - Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography
- SEMI Guideline S22 - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
- ANSI R15.06 - American National Standard for Industrial Robots and Robot Systems – Safety Requirements
- SEMI S1 - Safety Guideline for Visual Hazard Alerts
- SEMI S3 - Safety Guidelines for Heated Chemical Baths
- SEMI S6 - Safety Guideline for Ventilation
- SEMI S10 - Safety Guideline for Risk Assessment
- SEMI S11 - Environmental, Safety, and Health Guidelines for Semiconductor manufacturing Equipment Mini-environments
- SEMI S13 - Safety Guideline For Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment
- SEMI S14 - Safety Guideline For Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
All aspects of compliant design are included in this comprehensive training course.
Design for Electrical Safety (1-Day Course)
This electrical safety design course begins with the fundamentals of electrical safety. It then progresses to discuss electrical design in the semiconductor industry as it relates to essential national, international, and industry standards such as,
- NFPA 79 - Electrical Standard for Industrial Machinery,
- EN60204 - Safety of machinery – Par 1 General Requirements, and
- SEMI S22 “Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment.
The emphasis is given on both understanding requirements and successfully applying them to electrical design. This course relies heavily on examples to facilitate interactive discussion and understanding of the material.
Design for SEMI S22 Compliance (1-Day Course)
This course provides detailed information to electrical design engineering on the new SEMI Guideline S22, “Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment”. Understanding requirements and their application is the central trust of this course. Examples and brief in-class exercises help illustrate the material.
Design for SEMI S8 Compliance (1-Day Course)
This course has a dual focus, understanding the requirements of SEMI S8 the “Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing” and understanding how to apply them to ergonomically sound equipment design. While ergonomics is an increasing important topic, it is also a difficult concept for design engineers to grasp and effectively apply. This course effectively bridges that gap. The key is getting the design engineers to understand ergonomic requirements as another set of design parameters that must be taken account during the design phase, and then providing them with practical solutions to the implementation of such a program. Emphasis of this course is to cost efficient ergonomic design of equipment.
Safety/Compliance Design for Gas Boxes (1-Day Course)
This course focuses on gas box design for toxics, flammables, as well as pyrophorics. The materials cover all aspects of gas box design including ventilation, P&ID design, and component selection as it relates to safety and compliance. Emphasis is given to both comprehending requirements and applying them. This course makes use of essential reference standards such as,
- F15 - Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography,
- SEMI S6 - Safety Guideline for Ventilation,
- NFPA 70 - National Electric Code and Uniform Fire Code, and
- NFPA 496 - Standard for Purged and Pressurized Enclosures.
Product Safety for Non-Engineering Safety Professionals (1-Day Course)
This course is intended for the environmental, heath, and safety professionals who has a sound safety background but has limited experience in product safety. The focus help these individual develop the additional skill sets needed to be able to knowledgeably address equipment safety issues. Developing an understanding basic schematics and relating them to essential product safety issues is at the heart of this course. The step by step approach has proven to be effective in expanding the realm where safety professionals can perform there jobs.
Design for Machinery Directive and Low Voltage Directive Compliance (1-Day Course)
This material in this course is intended to address compliance to these directive as they relate to semiconductor manufacturing equipment. Annex 1 of the Machinery Directive is considered along with EN60204 “Safety of machinery – Part 1 General Requirements” as the path to compliance with the Low Voltage Directive. Special emphasis is given to how to cost effectively comply with these directive in conjunction with SEMI S2.
OSHA Compliance Training Programmes
Earth Tech offers numerous training courses that compliment our technical experience in developing Occupational Safety and Health Administration (OSHA) Programs. As key to developing effective and value-added OSHA training, Earth Tech explains the regulatory requirements and ensures the needs of the employee and employer safety programs are met. We accomplish this by including specific examples of the program enactment at the facility followed by open-ended questions targeted to the audience to make them aware and ask questions. All of our regulatory compliance training courses can be complimented by a straightforward multiple-choice quiz to make certain the attendees grasped the key concepts. The quiz, if selected as an option, also provides added documentation for compliance to the specific standard.
Training programs are designed to meet the criteria in the NIOSH report; Assessment of Occupational Safety and Health Training. Training programs include:
- Radiation Awareness
- Confined Space Entry
- Emergency Response
- Respiratory Protection
- Hearing Conservation
- Hazard Communication
- Blood-borne Pathogens
- Laser Safety Awareness Training
- Lockout/Tagout Training programs
- Hazardous Waste Management
- Injury / Illness Prevention Programs
- Electric Safety
- And many others..
A few of these training programs are highlighted below:
Lock Out / Tag Out (LOTO ) (29 CFR 1910.147)
Earth Tech has developed and performed LOTO or hazardous energy removal training for several different types of industries. The emphasis is to ensure that the primary regulatory steps, along with company documented procedures, are followed and result in the removal of all hazardous energies. We present the specifics of the client’s’ LOTO program requirements. Earth Tech can also bring some small customized electrical test subsystems into the classroom in addition to hands-on or videotaped re-enforcement of the LOTO procedure steps. We provide statistics and examples of injuries that have occurred when proper lockout has been executed. The training is typically customized to provide detailed information on the types of equipment that are included in the LOTO program at a facility. We also have extensive experience in assisting companies with identifying proper LOTO procedures even in difficult maintenance task environments.
Hazard Communication / Safety & Awareness (29 CFR 1910.1200)
Hazard communication (haz-com) is an essential element to a company’s employee safety program. The essential elements of chemical approval / procurement, material safety data sheets (MSDSs), access to MSDSs, labeling, personal protective equipment (PPE) and proper storage and materials handling of chemicals are covered. Earth Tech covers OSHA-required sections including iInfrequent tasks and contractor requirements. Earth Tech is capable of performing varying lengths of haz-com training combined with additional key safety information inputs including building evacuation procedures, identifying safety issues, reporting injuries or illnesses and safe chemical handling.
Respiratory Protection (29 CFR 1910.134)
Respiratory protection training is offered on a variety of levels to focus on the needs of the program. Earth Tech offers training that includes all encompassing respiratory protection or sessions focused specifically on air-purifying or on air supplied type respirators. Offering classes geared to the needs of the on-site respiratory program adds more value to the safety needs and application of the personal protective equipment. In conjunction with the training Earth Tech can also offer fit-testing and overall review of the use of respirators at the facility. We have written programs and templates that can assist an employer in properly documenting the critical regulatory requirements for its program.
Confined Space & Permit Required Confined Space (29 CFR 1910.146)
Completing a detailed review of the facility to identify the potential confined space & permit required confined spaces is critical to a compliant program. As a component of the training course, Earth Tech has assisted companies in creating an inventory of confined spaces (permit & non-permit). Based on the inventory, Earth Tech assists clients in identifying the hazards and determining engineering and hazardous energy removal actions that can minimize the confined spaces that must be permit required. Training is then used to provide the awareness and understanding that employees must possess to safely manage on-site confined spaces. Depending on client needs, Earth Tech has conducted full permit required confined space training including industrial hygiene monitoring and emergency retrieval.
Laser Safety / Awareness (ANSI Z136.1 – 2000)
The application of Lasers in manufacturing processes is expanding quikly. Earth Tech offers employee awareness training as outlined in ANSI Z136.95. The instruction includes the fundamental operation of lasers, laser characteristics, hazards, labeling and personal protective equipment. Facility safety policies for purchasing, maintaining and operating lasers are integrated also into the training sessions. Earth Tech’s approach involves working closely with the Laser Safety Officer (LSO) in customizing the training to the specific lasers in use at the facility. Digital photographs of tasks and operations using lasers are incorporated to focus the discussions on the specific lasers used in the facility.

